3D X-ray Microscopy in Electronics
Bruce Johnson
Chip Scale Review, November/December 2013, 24-27
L.W. Kong, J.R. Lloyd, K.B. Yeap, E. Zschech, et al.
J. Appl. Phys. 110, 053502 (2011)
DOI : 10.1063/1.3629988, finite element analysis, silicon, stress effects, three-dimensional integrated circuits
E. Zschech, A. Diebold
AIP Conf. Proc. 1395, 233-239 (2011)
DOI: 10.1063/1.3657897, metrology, failure analysis, three-dimensional integrated circuits, TSV
M. Pacheco, D. Goyal
Reliability Physics Symposium (IRPS), 2010 IEEE International 252-258 (2010)
DOI: 10.1109/IRPS.2010.5488820, failure analysis, Thermal Stress, Solder Bump Cracking
C. Uzoh, R. Sharna, P. Monajemi, M. Newman, et al.
Paper presented at IWLPC 2012, San Jose, CA
Read paper here, TSV, cavity fill efficiency, plating planarization factor
E. Zschech, W. Yun, G. Schneider
Appl. Phys. A 92, 423-429 (2008)
DOI: 10.1007/s00339-008-4551-x, failure analysis, in situ, interconnect degradation